Failure mechanisms of discrete protection device subjected to repetitive electrostatic discharges (ESD)

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Failure mechanisms of discrete protection device subjected to repetitive electrostatic discharges (ESD)

High reliability electronic devices need to sustain thousand of Electrostatic Discharge (ESD) stresses during their lifetime. In this paper, it is demonstrated that repetitive ESD stresses on a protection device such as a bidirectional diode induce progressive defects into the silicon bulk. With “Sirtl etch” failure analysis technique, the defects could be localized quite precisely at the perip...

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— In electronic systems the ever-increasing level of integration is paced by component scaling. Consequently, system level protection improvements in electrostatic discharge (ESD) reliability during a device's lifetime is mandatory. To this end we have investigated bidirectional system level ESD protection diodes that have been subjected to repetitive HMM stresses. Our goal was to develop robus...

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ژورنال

عنوان ژورنال: Microelectronics Reliability

سال: 2009

ISSN: 0026-2714

DOI: 10.1016/j.microrel.2009.06.010