Failure mechanisms of discrete protection device subjected to repetitive electrostatic discharges (ESD)
نویسندگان
چکیده
منابع مشابه
Failure mechanisms of discrete protection device subjected to repetitive electrostatic discharges (ESD)
High reliability electronic devices need to sustain thousand of Electrostatic Discharge (ESD) stresses during their lifetime. In this paper, it is demonstrated that repetitive ESD stresses on a protection device such as a bidirectional diode induce progressive defects into the silicon bulk. With “Sirtl etch” failure analysis technique, the defects could be localized quite precisely at the perip...
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ژورنال
عنوان ژورنال: Microelectronics Reliability
سال: 2009
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2009.06.010